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1

A MEMS packaged capacitive pressure sensor employing 3C-SiC with operating temperature of 500 °C

Marsi, Noraini, Majlis, Burhanuddin Yeop, Hamzah, Azrul Azlan, Mohd-Yasin, Faisal

Journal:

Microsystem Technologies

Année:

2015

Langue:

english

Fichier:

PDF, 2.95 MB

english, 2015

2

A Review of MEMS Capacitive Microphones

Zawawi, Siti Aisyah, Hamzah, Azrul Azlan, Majlis, Burhanuddin Yeop, Mohd-Yasin, Faisal

Journal:

Année:

2020

Fichier:

PDF, 1.58 MB

2020

3

Power Management IC for a Dual-Input-Triple-Output Energy Harvester

Mui, Kai-Meng, Khaw, Mei-Kum, Mohd-Yasin, Faisal

Journal:

Année:

2020

Fichier:

PDF, 10.24 MB

2020

4

[IEEE 2009 IEEE 8th International Conference on ASIC (ASICON) - Changsha, Hunan, China (2009.10.20-2009.10.23)] 2009 IEEE 8th International Conference on ASIC - Development of CMOS UHF RFID modulator and demodulator using DTMOST techniques

Teh, Ying-Khai, Mohd-Yasin, Faisal, Choong, Florence, Reaz, Mamun Ibne

Année:

2009

Langue:

english

Fichier:

PDF, 3.07 MB

english, 2009

5

The fabrication of back etching 3C-SiC-on-Si diaphragm employing KOH + IPA in MEMS capacitive pressure sensor

Marsi, Noraini, Majlis, Burhanuddin Yeop, Mohd-Yasin, Faisal, Hamzah, Azrul Azlan

Journal:

Microsystem Technologies

Année:

2015

Langue:

english

Fichier:

PDF, 4.12 MB

english, 2015

6

Development of high temperature resistant of 500 °C employing silicon carbide (3C-SiC) based MEMS pressure sensor

Marsi, Noraini, Majlis, Burhanuddin Yeop, Hamzah, Azrul Azlan, Mohd-Yasin, Faisal

Journal:

Microsystem Technologies

Année:

2015

Langue:

english

Fichier:

PDF, 2.04 MB

english, 2015

7

Characterization of ProTEX® PSB Thin Film as a Photosensitive Layer for MEMS Capacitive Pressure Sensor Diaphragm Based on SiC-on-Si Wafer

Marsi, Noraini, Yeop Majlis, Burhanuddin, Azlan Hamzah, Azrul, Mohd-Yasin, Faisal

Journal:

Key Engineering Materials

Année:

2013

Langue:

english

Fichier:

PDF, 1.20 MB

english, 2013

8

RF Sputtering, Post-Annealing Treatment and Characterizations of ZnO (002) Thin Films on 3C-SiC (111)/Si (111) Substrates

Valliyil Sasi, Visakh, Iqbal, Abid, Chaik, Kien, Iacopi, Alan, Mohd-Yasin, Faisal

Journal:

Année:

2017

Langue:

english

Fichier:

PDF, 2.53 MB

english, 2017

9

A Simple Equation for the Energy Stored by Voltage-Dependent Capacitances

Jadli, Utkarsh, Mohd-Yasin, Faisal, Moghadam, Hamid Amini, Nicholls, Jordan R., Pande, Peyush, Dimitrijev, Sima

Journal:

IEEE Transactions on Power Electronics

Année:

2020

Fichier:

PDF, 812 KB

2020

10

Measurement of Power Dissipation Due to Parasitic Capacitances of Power MOSFETs

Jadli, Utkarsh, Mohd-Yasin, Faisal, Moghadam, Hamid Amini, Pande, Peyush, Nicholls, Jordan R., Dimitrijev, Sima

Journal:

Année:

2020

Fichier:

PDF, 1.62 MB

2020

11

Measurement of noise characteristics of MEMS accelerometers

Faisal Mohd-Yasin, Can E Korman, David J Nagel

Journal:

Solid-State Electronics

Année:

2003

Langue:

english

Fichier:

PDF, 261 KB

english, 2003

12

SiC-based Piezoelectric Energy Harvester for Extreme Environment

Kudimi, Jagan Mohan Reddy, Mohd-Yasin, Faisal, Dimitrijev, Sima

Journal:

Procedia Engineering

Année:

2012

Langue:

english

Fichier:

PDF, 429 KB

english, 2012

13

[IEEE 2014 IEEE 11th International Conference on Semiconductor Electronics (ICSE) - Kuala Lumpur, Malaysia (2014.8.27-2014.8.29)] 2014 IEEE International Conference on Semiconductor Electronics (ICSE2014) - Design optimization and finite element analysis of AlN/3C-SiC piezoelectric bio-sensors

Iqbal, Abid, Mohd-Yasin, Faisal, Dimitrijev, Sima

Année:

2014

Langue:

english

Fichier:

PDF, 1.44 MB

english, 2014

14

[IEEE 2014 IEEE 11th International Conference on Semiconductor Electronics (ICSE) - Kuala Lumpur, Malaysia (2014.8.27-2014.8.29)] 2014 IEEE International Conference on Semiconductor Electronics (ICSE2014) - Development of a silicon carbide MEMS capacitive pressure sensor operating at 500 °C

Marsi, Noraini, Majlis, Burhanuddin Yeop, Hamzah, Azrul Azlan, Abidin, Ummikalsom, Mohd-Yasin, Faisal

Année:

2014

Langue:

english

Fichier:

PDF, 1.34 MB

english, 2014

15

[IEEE 2012 10th IEEE International Conference on Semiconductor Electronics (ICSE) - Kuala Lumpur, Malaysia (2012.09.19-2012.09.21)] 2012 10th IEEE International Conference on Semiconductor Electronics (ICSE) - Comparison of mechanical deflection and maximum stress of 3C SiC- and si-based pressure sensor diaphragms for extreme environment

Marsi, Noraini, Majlis, Burhanuddin Yeop, Hamzah, Azrul Azlan, Mohd-Yasin, Faisal

Année:

2012

Langue:

english

Fichier:

PDF, 1.36 MB

english, 2012

16

[IEEE 2012 10th IEEE International Conference on Semiconductor Electronics (ICSE) - Kuala Lumpur, Malaysia (2012.09.19-2012.09.21)] 2012 10th IEEE International Conference on Semiconductor Electronics (ICSE) - Automated switching mechanism for multi-standard RFID transponder

Ting, Teh Kim, Kum, Khaw Mei, Mohd-Yasin, Faisal

Année:

2012

Langue:

english

Fichier:

PDF, 719 KB

english, 2012

17

[IEEE 2011 IEEE 54th International Midwest Symposium on Circuits and Systems (MWSCAS) - Seoul, Korea (South) (2011.08.7-2011.08.10)] 2011 IEEE 54th International Midwest Symposium on Circuits and Systems (MWSCAS) - A multi-standard modulator for high frequency passive RFID transponder

Fei, Lim Yi, Kum, Khaw Mei, Mohd-Yasin, Faisal

Année:

2011

Langue:

english

Fichier:

PDF, 1.26 MB

english, 2011

18

Growth and Characterization of (100) and (111) 3C-SiC Thin Film for MEMS Capacitive Pressure Sensor for Extreme Environments

Marsi, Noraini, Majlis, Burhanuddin Yeop, Hamzah, Azrul Azlan, Mohd-Yasin, Faisal

Journal:

Advanced Materials Research

Année:

2014

Langue:

english

Fichier:

PDF, 1.21 MB

english, 2014

19

RF sputtering of polycrystalline (100), (002), and (101) oriented AlN on an epitaxial 3C-SiC (100) on Si(100) substrate

Iqbal, Abid, Chaik, Kien, Walker, Glen, Iacopi, Alan, Mohd-Yasin, Faisal, Dimitrijev, Sima

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2014

Langue:

english

Fichier:

PDF, 1.24 MB

english, 2014

20

Low Frequency Noise Measurement and Analysis of Capacitive Micro-Accelerometers: Temperature Effect

Mohd-Yasin, Faisal, Nagel, David J., Ong, D. S., Korman, Can E., Chuah, H. T.

Journal:

Japanese Journal of Applied Physics

Année:

2008

Langue:

english

Fichier:

PDF, 826 KB

english, 2008

21

Design Optimization and Finite Element Analysis of 3C-SiC Bio-Sensors Based on Dogbone Resonator

Iqbal, Abid, Mohd-Yasin, Faisal, Dimitrijev, Sima

Journal:

Applied Mechanics and Materials

Année:

2014

Langue:

english

Fichier:

PDF, 1.22 MB

english, 2014

22

High Reliability of MEMS Packaged Capacitive Pressure Sensor Employing 3C-SiC for High Temperature

Marsi, Noraini, Majlis, Burhanuddin Yeop, Hamzah, Azrul Azlan, Mohd-Yasin, Faisal

Journal:

Energy Procedia

Année:

2015

Langue:

english

Fichier:

PDF, 751 KB

english, 2015

23

[IEEE 2015 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) - Kuala Terengganu, Malaysia (2015.8.19-2015.8.21)] 2015 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) - 3C-SiC-on-Si based MEMS packaged capacitive pressure sensor operating up to 500 ºC and 5 MPa

Marsi, Noraini, Majlis, Burhanuddin Yeop, Hamzah, Azrul Azlan, Abidin, Hafzaliza Erny Zainal, Mohd-Yasin, Faisal

Année:

2015

Langue:

english

Fichier:

PDF, 455 KB

english, 2015

24

[IEEE 2015 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) - Kuala Terengganu, Malaysia (2015.8.19-2015.8.21)] 2015 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) - Comparison of seven cantilever designs for piezoelectric energy harvester based On Mo/AlN/3C-SiC

Iqbal, Abid, Mohd-Yasin, Faisal

Année:

2015

Langue:

english

Fichier:

PDF, 433 KB

english, 2015

25

Digital microfluidics with magnetically actuated floating liquid marble

Khaw, Mei Kum, Ooi, Chin Hong, Mohd-Yasin, Faisal, Vadivelu, Raja, St John, James, Nguyen, Nam-Trung

Journal:

Année:

2016

Langue:

english

Fichier:

PDF, 1.62 MB

english, 2016

26

[IEEE 2016 IEEE International Conference on Semiconductor Electronics (ICSE) - Kuala Lumpur, Malaysia (2016.8.17-2016.8.19)] 2016 IEEE International Conference on Semiconductor Electronics (ICSE) - Mechanical analysis of condenser microphone based on silicon carbide diaphragm for sonic detection

Zawawi, Siti Aisyah, Hamzah, Azrul Azlan, Majlis, Burhanuddin Yeop, Mohd-Yasin, Faisal

Année:

2016

Langue:

english

Fichier:

PDF, 1.00 MB

english, 2016

27

AIP Conference Proceedings [AIP Publishing LLC 3RD INTERNATIONAL CONFERENCE ON FUNDAMENTAL AND APPLIED SCIENCES (ICFAS 2014): Innovative Research in Applied Sciences for a Sustainable Future - Kuala Lumpur, Malaysia (3–5 June 2014)] - The design and optimization of two low frequency energy harvesters employing 3C-SiC/AlN/Mo composite layers

Iqbal, Abid, Mohd-Yasin, Faisal, Dimitrijev, Sima

Année:

2014

Langue:

english

Fichier:

PDF, 944 KB

english, 2014

28

Dynamic behaviour of a magnetically actuated floating liquid marble

Khaw, Mei Kum, Ooi, Chin Hong, Mohd-Yasin, Faisal, Nguyen, Anh V., Evans, Geoffrey M., Nguyen, Nam-Trung

Journal:

Microfluidics and Nanofluidics

Année:

2017

Langue:

english

Fichier:

PDF, 945 KB

english, 2017

29

DC sputtering of highly c-axis AlN films on top of 3C-SiC (111)-on-Si (111) substrates under various N 2 concentrations

Iqbal, Abid, Walker, Glenn, Hold, Leonie, Fernandes, Alanna, Iacopi, Alan, Mohd-Yasin, Faisal

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2017

Langue:

english

Fichier:

PDF, 1.32 MB

english, 2017

30

Magnetically-Actuated Mixing and Merging of Acid-Base Micro-Droplets on Open Surfaces: Preliminary Study

Khaw, Mei-Kum, Mohd-Yasin, Faisal, Nguyen, Nam-Trung

Journal:

Année:

2018

Langue:

english

Fichier:

PDF, 1.81 MB

english, 2018

31

Reactive Sputtering of Aluminum Nitride (002) Thin Films for Piezoelectric Applications: A Review

Iqbal, Abid, Mohd-Yasin, Faisal

Journal:

Année:

2018

Langue:

english

Fichier:

PDF, 1.53 MB

english, 2018

32

[IEEE 2018 IEEE International Conference on Semiconductor Electronics (ICSE) - Kuala Lumpur (2018.8.15-2018.8.17)] 2018 IEEE International Conference on Semiconductor Electronics (ICSE) - Dynamic Behavior of Condenser Microphone Under the Influence of Squeeze Film Damping

Zawawi, Siti Aisyah, Hamzah, Azrul Azlan, Selvarajan, Reena Sri, Majlis, Burhanuddin Yeop, Mohd-Yasin, Faisal

Année:

2018

Langue:

english

Fichier:

PDF, 1.10 MB

english, 2018

33

The Correct Equation for the Current Through Voltage-Dependent Capacitors

Jadli, Utkarsh, Mohd-Yasin, Faisal, Moghadam, Hamid Amini, Nicholls, Jordan R., Pande, Peyush, Dimitrijev, Sima

Journal:

Année:

2020

Fichier:

PDF, 3.92 MB

2020